发明名称 |
METHOD FOR CONTROLLING DEVELOPING SOLUTION AND REMOVING SOLUTION |
摘要 |
PROBLEM TO BE SOLVED: To remove a photosensitive material from a developing solution and a removing solution and to prolong the service lives of the developing solution and the removing solution. SOLUTION: In the method for controlling the developing solution and the removing solution, the photosensitive material dissolved or dispersed in the developing solution and the removing solution is electrolyzed and removed from the developing solution and the removing solution. |
申请公布号 |
JP2002148823(A) |
申请公布日期 |
2002.05.22 |
申请号 |
JP20000340219 |
申请日期 |
2000.11.08 |
申请人 |
NIPPON HYOMEN KAGAKU KK |
发明人 |
MAEDA MITSUHIDE;IBARAGI HIDEYUKI |
分类号 |
G03F7/42;G03F7/32;H01L21/027;H04N1/00;H05K3/06;(IPC1-7):G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|