发明名称 METHOD FOR CONTROLLING DEVELOPING SOLUTION AND REMOVING SOLUTION
摘要 PROBLEM TO BE SOLVED: To remove a photosensitive material from a developing solution and a removing solution and to prolong the service lives of the developing solution and the removing solution. SOLUTION: In the method for controlling the developing solution and the removing solution, the photosensitive material dissolved or dispersed in the developing solution and the removing solution is electrolyzed and removed from the developing solution and the removing solution.
申请公布号 JP2002148823(A) 申请公布日期 2002.05.22
申请号 JP20000340219 申请日期 2000.11.08
申请人 NIPPON HYOMEN KAGAKU KK 发明人 MAEDA MITSUHIDE;IBARAGI HIDEYUKI
分类号 G03F7/42;G03F7/32;H01L21/027;H04N1/00;H05K3/06;(IPC1-7):G03F7/42 主分类号 G03F7/42
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