| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film having fine holes on the surface such that the fine holes demonstrate a liquid holding effect, when a processing liquid or a lubricant is used for tools or parts whose surface is coated with the hard film having adequately arranged fine holes, and that, therefore, the film can extend a service life for tools including a tip, drill, metallic die, etc., and for sliding parts like bearings even under severe using conditions, and also to provide a coating device for this film. SOLUTION: The hard film, which is applied on the surface of a base material, is studded with such fine holes on the surface that have a depth of 1.0μm or above, an average diameter of 0.5-5μm, and a ratio between the total hole opening areas and the entire hard film surface area of 0.02-0.20. Consequently, compared with a conventional identical hard film, a lubricating ability is secured by the supply of the processing liquid or the lubricant through the liquid holding effect, thereby enabling the life of the tools or the sliding parts to be prolonged.
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