JOINTED BODY OF SILICON CARBIDE SINTERED COMPACT, MEMBER FOR PRODUCING SEMICONDUCTOR USING THE SAME AND METHOD OF PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a jointed body of SiC sintered compacts being the jointed body whose jointing strength is always high. SOLUTION: SiC sintered compacts 1 and 2, each obtained by pressureless sintering and having a bulk density of >=2.8 g/cm3 are jointed to each other through a jointing part 3 comprising Si and filling parts 4 and 5 comprising Si which is filled in open pores 1a and 2a opening to the jointing face of the SiC sintered compacts and being unified with the Si at the jointing part 3.