| 摘要 |
PROBLEM TO BE SOLVED: To improve a conventional method so as to save dry processes such as mirror polishing, sputtering, or the like which have been conducted in the conventional method, in the anodic jointing method for jointing parts being different materials or the same material and to secure stable jointing strength at a low cost. SOLUTION: The anodic jointing method comprises superposing parts comprising different materials or the same material and joining the superposed parts. For example, when a ceramic substrate 6 and a silicon substrate 7 are anodically jointed, a strong jointed body is obtained by coating the surface (surface roughness is a level obtained by lapping) of the ceramic substrate with a borosilicate glass paste by a screen printing method, then firing the coated substrate to form a flat borosilicate glass film 8, thereafter, superposing the ceramic substrate onto the silicon substrate in such a manner that the borosilicate glass film 8 is interposed between the ceramic substrate and the silicon substrate, connecting the ceramic substrate and the silicon substrate to an electric source through a heater electrode 3 and a negative electrode 4 in this state, heating and impressing a voltage to anodically joint the ceramic substrate and the silicon substrate.
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