| 摘要 |
PROBLEM TO BE SOLVED: To provide a container for liquid hydrogen fluoride, a replenishing method for the container, and a substrate processor capable of easily and safely performing work for replenishing liquid hydrogen fluoride or mixed liquid containing liquid hydrogen fluoride into the container. SOLUTION: A second pipe 13 for replenishing liquid hydrogen fluoride or mixed liquid containing liquid hydrogen fluoride into the container body 3a connected to the interior of a substrate processing chamber 2 through a first pipe 11 is connected to the inside of the container body 3a, and the second pipe 13 is provided with an opening and closing valve 19 opened and closed according to the detection result of liquid storing amount detecting means 20, 21.
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