| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray electron spectroscopic analyzer which increases the reliability of the result of a measurement by a method wherein the utilization efficiency of X-rays in the measurement is increased and the S/N ratio of an electronic signal from an object, to be analyzed, discharged when it is irradiated with the X-rays is enhanced. SOLUTION: The X-ray electron spectroscopic analyzer is constituted so as to be provided with an X-ray generator 40 which generates the X-rays, an optical system 50 which analyzes a substance constituting the object, to be analyzed, through the detection of charged particles discharged from the object, to be analyzed, irradiated with the X-rays, a vacuum bellows 60 which is provided between the X-ray generator 40 and the optical system 50 and by which the inside is maintained at a low pressure at a high degree of vacuum and shielding means 90a, 90b which are provided between the X-ray generator 40 and the optical system 50 and which are installed at the inside of the vacuum bellows 60 in order to prevent a discharge element other than the X-rays discharged from the X-ray generator 40 from flowing into the optical system 50 or, as required, a magnet 100 which is provided at the bottom face part between the shielding means 90a, 90b.</p> |
