| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized device temperature characteristic measuring device capable of measuring precisely the device surface temperature in a bath, while the inside of the thermostatic bath is kept at a prescribed temperature accurately, quickly and stably with low power consumption, and imaging the device from an optional angle with high visibility. SOLUTION: In this device, the small-sized thermostatic bath 1 for holding the device 2 is its inside is made of silicon which is an infrared-ray transmissive raw material, and an infrared-ray illumination 10 for irradiating the device 2 in the bath 1 and a measuring probe 8 for executing temperature measurement thereof as objects with an infrared ray and an infrared camera 9 for imaging a reflected image are arranged oppositely outside the bath 1, and a temperature control part 7 executes temperature control of a heat exchanger 3 according to the temperature detection result of a temperature sensor 4 mounted in a metal plate 5 on the bottom of the bath 1 and the target setting temperature of a device temperature command part 6, to thereby keep the inside of the bath 1 at a prescribed uniform temperature, and the detection result of the relative position by a position detection part 13 is reflected to a measuring probe driving part 14 and an illumination control part 16 from image processed data of an image signal by the camera 9.
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