X-RAY FLUORESCENCE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray fluorescence analyzer by which X-ray fluorescence emitted from a sample irradiated with X-rays is detected with satisfactory efficiency. SOLUTION: A plurality of semiconductor detectors 18 which capture fluorescent X-ray photons and which generate a plurality of electric pulses suitable for the analysis of the sample so as to correspond to the photons are arranged around a spot 26. A multiple input processing unit 20 which receives and analyzes the plurality of pulses is arranged in such a way that the pulses from the respective detectors 18 are received at separate input ends. The unit 20 responds to the photons within an energy range common to all the detectors 18 so as to generate an output by using the pulses received from all the detectors 18.