HIGH PURITY CHEMICAL STORAGE AND DELIVERY APPARATUS WITH SECONDARY STORAGE CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide a cabinet for receiving a chemical flowing from a container in the cabinet and also for keeping in the container without allowing a chemical liquid to further flow out. SOLUTION: The highly purity chemical storage and delivery apparatus with a secondary storage container comprises the cabinet for receiving a canister of the chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet, a control unit for controlling delivery to the downstream of the chemical from the canister and the cabinet, a closeable opening in the cabinet for allowing the canister to be loaded into and unloaded from the cabinet, a door for closing the opening, and a liquid-tight secondary container door in the opening for closing a portion of the opening such that the secondary container door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to receive the entire high purity chemical liquid contents of the canister.