Fluid control system and valve to be used therein

摘要

A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L1, L2, ...) for feeding plural types of fluid (G1, G2,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L1, L2,...) for switching the fluids (G1, G2,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).