发明名称 |
Disk for conditioning polishing pads |
摘要 |
A conditioning disk including a unitary thermoplastic polymer sheet material cut a unitary circular plate formed with gear teeth along its circular edge, and formed with block form protrusions that are impelled in a sweeping motion by rotation of the unitary plate as a planetary gear in meshed engagement with a sun gear and a ring gear of a polishing apparatus.
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申请公布号 |
US6390909(B2) |
申请公布日期 |
2002.05.21 |
申请号 |
US20010819115 |
申请日期 |
2001.03.28 |
申请人 |
RODEL HOLDINGS, INC. |
发明人 |
FOSTER BERNARD;FREEMAN PAUL J. |
分类号 |
B24B37/04;B24B53/007;B24B53/12;(IPC1-7):B24B21/18 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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