| 摘要 |
PROBLEM TO BE SOLVED: To reduce a remaining amount on a polishing pad such as dust on the polishing pad and diamond grains falling from a diamond disc. SOLUTION: In a pad conditioner 1 which is provided with a head 3 for mounting a diamond disc 9 made by fixing diamond grains 8 on a surface and a rotary driving mechanism 15 for rotating the head 3 and grinds the polishing pad 2 by rotating the diamond disc 9 in contact with the surface of the polishing pad 2, the head 3 is provided with a washing liquid supplying means 6 for supplying washing liquid between the diamond disc 9 and the polishing pad 2 and a washing liquid recovering means 7 for recovering the washing liquid passed between the diamond disc 9 and the polishing pad 2. |
