发明名称 LAMINATING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a laminating apparatus having a pressurizing and heating means capable of effectively pressurizing and heating a material to be laminated without using a diaphragm for a pressurizing means of the material. SOLUTION: The laminating apparatus comprises a chamber formed to airtightly connect a lower chamber case 1 to an upper chamber case 2 and to house the material to be laminated, performing evacuation into vacuum in the chamber. The apparatus heats, pressurizes and laminates the material 11. The apparatus further comprises a support plate 3 installed in the case 1 to mount the material 11 on a upper surface, a heating plate 43 mounted in the case 2 to heat the material 11 so that one or both of the plate 3 or the plate 43 are vertically movably provided in the chamber to pressure and heat the material 11 in the chamber.</p>
申请公布号 JP2002144431(A) 申请公布日期 2002.05.21
申请号 JP20000348380 申请日期 2000.11.15
申请人 NISSHINBO IND INC 发明人 KUSHIHARA TOSHIAKI
分类号 B29C65/02;H01L31/042;(IPC1-7):B29C65/02 主分类号 B29C65/02
代理机构 代理人
主权项
地址