发明名称 |
Dual face shower head magnetron, plasma generating apparatus and method of coating a substrate |
摘要 |
An electrode is provided which can improve the efficiency and quality of plasma-generated coatings in a plasma enhanced chemical vapor deposition coating device. The electrode comprises dual shower head faces containing in the preferred mode a plurality of magnets which are aligned so that the poles of the magnets face in the same direction to thus generate two magnetron faces for each set of magnets.
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申请公布号 |
US6390020(B1) |
申请公布日期 |
2002.05.21 |
申请号 |
US20000509722 |
申请日期 |
2000.03.30 |
申请人 |
THE DOW CHEMICAL COMPANY;METROLINE SURFACES, INC. |
发明人 |
HU ING-FENG;DYKHOUSE JEFFREY R. |
分类号 |
H05H1/46;C23C16/30;C23C16/44;C23C16/455;C23C16/50;C23C16/503;C23C16/509;H01J37/32;H01J37/34;H01L21/302;H01L21/3065;(IPC1-7):C23C16/00;C23C14/00;H05H1/00 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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