| 摘要 |
To provide a semiconductor device in which a direction of a conformation difference in respective wiring layers of semiconductor integrated circuits can be detected and at the same time a conformation difference detection sensitivity is increased. A semiconductor device is provided with semiconductor integrated circuits 10, which are practical circuits, and conformation difference detection circuits 11 in one and same semiconductor substrate. Each of the conformation difference detecting circuit 11 is provided with a plurality of lower layer wirings 31, a plurality of upper layer wirings 34 layered on the lower layer wirings 31 through insulating layers 32, and through holes 33 separately and successively contacting upper layer wirings 34 and the lower layer wirings 31 in constant directions and the conformation margin widths surrounding the contact faces of the through holes 33 are so set as to make widths d1, d3 positioned in prescribed one direction be narrower than widths d2, d4 positioned in the other direction.
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