| 摘要 |
There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.
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