发明名称 |
Mems-based spatial-light modulator with integrated electronics |
摘要 |
Method and apparatus for forming an array of reflective elements for spatial light modulation. The array includes a substrate supporting electronically addressable actuators, each associated with a corresponding reflective element, a coupling attaching each actuator to the corresponding reflective element to place each reflective element in a substantially planar surface. Each electronically addressable actuator responds to predetermined addressing from a processing circuit to reposition the corresponding reflective element out of the planar surface a predetermined distance identified in the predetermined electronic addressing. |
申请公布号 |
AU2751401(A) |
申请公布日期 |
2002.05.21 |
申请号 |
AU20010027514 |
申请日期 |
2000.11.06 |
申请人 |
TRUSTEES OF BOSTON UNIVERSITY |
发明人 |
THOMAS BIFANO;MARK HORENSTEIN |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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