| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror finished surface polishing device for the outer peripheral surface of a workpiece, capable of easily positioning the side outer peripheral surface of the workpiece to a polishing surface formed in specified shape on a polishing member, increasing the number of workpieces whose side outer peripheral surface can be polished into the mirror finished surfaces at the specified part of the polishing member, and efficiently using the polishing member. SOLUTION: In this mirror finished surface polishing device for polishing the side outer peripheral surface of the workpiece 32 such as a wafer into a mirror finished surface, a polishing tool for polishing the side outer peripheral surface of the workpiece 32 into the mirror finished surface comprises two polishing members 22a, 22b whose one-end parts are formed as uneven parts, and the polishing members 22a, 22b are energized by springs 18, 18 so that the uneven parts of the polishing members 22a, 22b are fitted to each other. The side outer peripheral surface of the workpiece 32 is inserted in the uneven fitted part to form a recessed groove 34 to be polished into the mirror finished surface.
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