MACHINING DEVICE AND COVER MEMBER USED FOR MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent a tool fitting part from being fouled in detaching a rough machining tool from the tool fitting part to finish with a finishing tool after performing rough machining with the rough machining tool fitted to the tool fitting part. SOLUTION: A finishing grinding wheel member 20 is fixed to a spindle 10 by bolt fastening. The spindle is formed with the tool fitting part 25 for fitting a rough grinding wheel member. The tool fitting part can be fitted with the rough grinding wheel member and also with a cover member 36. In finish- grinding a silicon wafer with the finishing grinding wheel member 20 after grinding it with the rough grinding wheel member, the cover member 36 is fitted to the tool fitting part 25 to protect the tool fitting part 25 from fouling.