发明名称 PROCESS FOR MAKING SUPERCONDUCTING T1-PB-SR-CA-CU OXIDE FILMS AND DEVICES
摘要 A process for making a superconducting Tl-Pb-Sr-Ca-Cu-O thin film comprised of at least one phase of the formula Tl0.5Pb0.5Sr2Ca1+n Cu2+n O7+2n where n = 0,1 or 2. The process comprises sputtering an oxide film onto a dielectric sub- strate from an oxide target containing preselected amounts of Tl, Pb, Sr, Ca and Cu, and heating an oxygen-containing at- mosphere in the deposited film in the presence of a source of thallium oxide and lead oxide and cooling the film.
申请公布号 CA2109962(C) 申请公布日期 2002.05.21
申请号 CA19922109962 申请日期 1992.06.08
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 KOUNTZ, DENNIS JAMES;PELLICONE, FRANK MATTHEW
分类号 C01G1/00;C01G21/00;C23C14/34;C30B29/22;C30B33/02;H01L;H01L39/24;(IPC1-7):H01L39/24;H01L39/12 主分类号 C01G1/00
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