发明名称 |
PROCESS FOR MAKING SUPERCONDUCTING T1-PB-SR-CA-CU OXIDE FILMS AND DEVICES |
摘要 |
A process for making a superconducting Tl-Pb-Sr-Ca-Cu-O thin film comprised of at least one phase of the formula Tl0.5Pb0.5Sr2Ca1+n Cu2+n O7+2n where n = 0,1 or 2. The process comprises sputtering an oxide film onto a dielectric sub- strate from an oxide target containing preselected amounts of Tl, Pb, Sr, Ca and Cu, and heating an oxygen-containing at- mosphere in the deposited film in the presence of a source of thallium oxide and lead oxide and cooling the film.
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申请公布号 |
CA2109962(C) |
申请公布日期 |
2002.05.21 |
申请号 |
CA19922109962 |
申请日期 |
1992.06.08 |
申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
KOUNTZ, DENNIS JAMES;PELLICONE, FRANK MATTHEW |
分类号 |
C01G1/00;C01G21/00;C23C14/34;C30B29/22;C30B33/02;H01L;H01L39/24;(IPC1-7):H01L39/24;H01L39/12 |
主分类号 |
C01G1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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