发明名称 Optical device, exposure device and device manufacturing method
摘要 In a barrel of an optical unit a ring shaped support member is integrally arranged, and three projected portions are arranged on the upper surface of the support member. The projected portions support a lower surface of a parallel flat plate supported in direct contact. In this supported state, the parallel flat plate opposes a surface of the support member with a clearance of several mu m in between. With this arrangement, the space in one side of the parallel flat plate is substantially isolated from the space in the other side. Accordingly, for example, even if gas environment in the space on one side of the parallel flat plate is different from the other side, gases can be effectively kept from mixing. In addition, since the parallel flat plate is supported at three coplanar points, deformation of the parallel flat plate can be suppressed due to the force supporting the parallel flat plate, thereby suppressing the index of refraction from varying. <IMAGE>
申请公布号 AU1426902(A) 申请公布日期 2002.05.21
申请号 AU20020014269 申请日期 2001.11.09
申请人 NIKON CORPORATION 发明人 NAOMASA SHIRAISHI
分类号 G03F7/20 主分类号 G03F7/20
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