DEVICE AND METHOD FOR DISTRIBUTING TREATMENT SOLUTION

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for distributing a treatment solution wherein the liquid level of the solution can be continuously monitored by means of a mechanism which is inexpensive and has a low risk of contaminating the solution. SOLUTION: The device comprises an airtight distribution tank 22 connected to specified facilities 12, 16, and 18 through a delivery pipe 26 and an airtight gas container 24 connected to the tank 22 through a pressurizing pipe 32. The pipe 32 is provided with a pressure regulator PR1, and a pressurization gas at a constant feed pressure is fed into the tank 22 from the container 24. The treatment solution is sent under pressure from the tank 22 through the pipe 26 by feeding the pressurization gas. The decrement in the pressure in the container 24 resulting from the sending of the solution under pressure is detected with a pressure gauge P1, and the decrement in the liquid level of the solution in the tank 22 is calculated.