Impedance matching transducers

摘要

The present invention provides exemplary transducer elements, transducer packages and methods of making same. One exemplary transducer element (10) has first and second transducer surfaces (14, 20) and a plurality of tapered pillars (16) that comprise piezoelectric material and extend between the first and second transducer surfaces. At least one of the pillars has a first cross-sectional area at the first transducer surface that is larger than a second cross-sectional area at the second transducer surface. Hence, the transducer has a lower acoustic impedance at the second surface than at the first surface.