| 摘要 |
<p>PURPOSE: Provided is a method of effectively recovering a copper component or a manganese component, in a recyclable form, from a cleaning agent containing copper oxide, a cleaning agent containing basic copper carbonate, a cleaning agent containing copper hydroxide, or a cleaning agent containing copper oxide and manganese oxide which has been used for removing a phosphine or a silane gas contained in a discharge gas produced during the course of a semiconductor production step or a similar step. CONSTITUTION: The method comprises immersing the cleaning agent in an acidic solution, to thereby dissolve the cleaning agent; adding to the resultant solution a precipitant for copper, to thereby cause a copper compound to precipitate; separating a copper component from a phosphorus component which has been sorbed in the cleaning agent during the course of cleaning the harmful gas; and recovering the copper component of the cleaning agent.</p> |
