| 摘要 |
PROBLEM TO BE SOLVED: To provide a water replacement method which can maintain the cleaning function of a cleaning petroleum solution and use the cleaning solution repeatedly and an apparatus for the method. SOLUTION: An ultrasonic vibrator (vibration means) 2a is arranged in a cleaning tank 1 in which the cleaning petroleum solution is placed, and a deairing column (water removing means) 3 is connected to the cleaning tank 1. An object 10 to be cleaned immersed in the cleaning solution is vibrated by ultrasonic waves from the vibrator 2a, and water and the cleaning solution which are adhered to the surface of the object 10 are replaced to clean the object 10. Only water of a mixed liquid of water and the cleaning solution is removed by the deairing column 3.
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