| 发明名称 |
FERROELECTRIC CAPACITOR, FERROELECTRIC MEMORY DEVICE, AND THEIR MANUFACTURING METHOD |
| 摘要 |
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| 申请公布号 |
SG88732(A1) |
申请公布日期 |
2002.05.21 |
| 申请号 |
SG19970002649 |
申请日期 |
1997.07.26 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
YUKIO FUKUDA;KATSUHIRO AOKI;KEN NUMATA;AKITOSHI NISHIMUMRA |
| 分类号 |
C23C28/00;H01L21/02;H01L21/822;H01L21/8242;H01L21/8246;H01L21/8247;H01L27/04;H01L27/105;H01L27/108;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):G11C11/22 |
主分类号 |
C23C28/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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