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发明名称
QUARTZ INSULATOR FOR ION IMPLANTER BEAMLINE COMPONENTS
摘要
申请公布号
SG88808(A1)
申请公布日期
2002.05.21
申请号
SG20000007535
申请日期
2000.12.20
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
KOUROSH SAADATMAND;DAVID RICHARD SWENSON;WILLIAM FRANK DIVERGILIO;STEPHEN MICHAEL QUINN;ZHIMIN WAN;VICTOR MAURICE BENVENISTE
分类号
H01J37/04;H01J37/12;H01J37/317;(IPC1-7):G21K5/10;H01J37/08
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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