PROCESS FOR PREPARING DATA FOR DIRECT-WRITING BY A CHARGED PARTICLE RAY, PROCESS FOR VERIFYING DATA FOR DIRECT-WRITING BY A CHARGED PARTICLE RAY, PROCESS FOR DISPLAYING DATA FOR DIRECT-WRITING BY A CHARGED PARTICLE RAY, AND EXPOSURE DEVICE

摘要

Plural patterns of cell projections made in an aperture are stored in a register. Cells in designed data are compared with the cell projections stored in the register by an interlayer operation, to judge whether or not a cell which coincides with any one of the cells in the designed data is present among the patterns of the cell projections stored in the register. In the case that the judgement that the coinciding cell is present is given, the coinciding cell projection is e acted and outputted as data for direct-writing. In the case that the judgement that no coinciding cell is present is given, if a cell whose reference frequency is over a given value is present, this cell is extracted and registered as a new cell projection.