Disk for conditioning polishing pads,申请号US09/819115-传众专利搜索

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发明名称	Disk for conditioning polishing pads
摘要
申请公布号	US6390909(B1)	申请公布日期	2002.05.21
申请号	US09/819115	申请日期	2001.03.28
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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