| 发明名称 |
DEVICE AND METHOD FOR SUCTION-HOLDING GLASS PLATE |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device and a method for suction-holding a glass plate, preventing the glass plate from getting dry by constantly supplying glass plate with water. SOLUTION: This device for suction-holding the glass plate is provided with a holding surface table 14 with a liquid supply hole 20 and a plurality of suction holes 18 in a placing face 16 for placing the glass plate 12; a liquid supply means 42 communicating with the liquid supply hole 20 to allow water to flow out to the placing face 16; and an exhaust means 40 communicating with the suction holes 18.</p> |
| 申请公布号 |
JP2002144180(A) |
申请公布日期 |
2002.05.21 |
| 申请号 |
JP20000341879 |
申请日期 |
2000.11.09 |
| 申请人 |
NIPPON ELECTRIC GLASS CO LTD |
发明人 |
OKUMURA HIROKAZU;NISHIMURA NAOKI |
| 分类号 |
B23Q3/08;B24B9/10;B24B41/06;B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B23Q3/08 |
主分类号 |
B23Q3/08 |
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