发明名称 |
Chemical vapor deposition coating of fibers using microwave application |
摘要 |
Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.
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申请公布号 |
US6391396(B1) |
申请公布日期 |
2002.05.21 |
申请号 |
US20000724593 |
申请日期 |
2000.11.28 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
BARMATZ MARTIN B.;HOOVER GORDON;JACKSON HENRY W. |
分类号 |
C23C16/48;C23C16/52;C23C16/54;H05B6/70;H05B6/74;H05B6/80;(IPC1-7):H05B6/64 |
主分类号 |
C23C16/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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