| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive polymer waveguide substrate, having a film alignment V-groove capable of obtaining optical coupling with the fiber at a small loss. SOLUTION: In this optical waveguide member which is the typical embodiment, an optical waveguide is formed on a part of a silicon substrate, a core or a cladding of the waveguide is composed of a polymer, a V-shaped groove for positioning and fixing the optical fiber to the waveguide is provided in the silicon substrate, a rectangular groove which extends in the direction orthogonal to the V-groove in the boundary between the V-groove and the waveguide is provided in the silicon substrate, the film thickness of the core or the cladding which composes the waveguide in the vicinity of the boundary is made smaller than that of the other part, the height of the center of the core of the film is made lower than the height of the core of the waveguide, at a position satisfactorily apart from the boundary when the fiber is mounted on the V groove, and a shape of the V-groove is set such that a height of high efficient optical coupling is obtained, between the fiber and the waveguide. |
