| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a superconducting device which can be easily structured and has a uniform characteristic. SOLUTION: After forming in a processing way a weakly bonded portion on a single-crystal substrate, a superconducting thin film is formed on the processed substrate to manufacture a superconducting device. For example, an amorphous alumina film 13 is formed on the region of an SrTiO3 single- crystal substrate 1 wherein the weakly bonded portion is formed. Subsequently, by forming extensively on the substrate a Ba-Y-Cu oxide superconducting film, a non-oriented Ba-Y-Cu film 9 is so formed on the alumina film, and c-axis oriented Ba-Y-Cu films 3a, 3b are so formed on the exposed SrTiO3 substrate as to create a weakly bonded element. |
