| 发明名称 |
SUBSTRATE PROCESSOR |
| 摘要 |
PROBLEM TO BE SOLVED: To improve the carrying efficiency of a wafer and to improve productivity in the substrate processor of a small amount batch type. SOLUTION: In this substrate processor for which the number of the wafers for products to be processed at one time is equal to or less than the number housed inside a substrate carrying container 15, a stacker 25 for housing dummy wafers is provided inside the processor. |
| 申请公布号 |
JP2002141391(A) |
申请公布日期 |
2002.05.17 |
| 申请号 |
JP20000337744 |
申请日期 |
2000.11.06 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
MATSUNAGA TATSUHISA;TERAMOTO MASAHIRO;MAYAMA HIDEKI;NOTO KOICHI |
| 分类号 |
H01L21/677;H01L21/205;H01L21/22;H01L21/31;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/677 |
| 代理机构 |
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