INSPECTION EQUIPMENT FOR SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To perform a highly accurate and highly stable and reliable inspection to a semiconductor wafer under a low temperature environment. SOLUTION: At the time of constituting this inspection equipment 1 for the semiconductor wafer provided with a cassette C for holding the semiconductor wafer W, and bringing probe terminals P or the like into contact with electrodes We or the like on the semiconductor wafer W altogether and an inspection device main body 2 for housing the cassette C, connecting the probe terminals P or the like and inspecting the semiconductor wafer W; the inspection equipment main body 2 is provided with a thermostatic chamber 2e for housing the cassette C, the intra-chamber temperature of the thermostatic chamber 2e is set to a first cooling temperature Te, a cooler 3 to be in contact with the cassette C housed in the thermostatic chamber 2e is provided and the cooling temperature of the cooler 3 is set to a second cooling temperature Tc.