| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate presence/absence confirmation method capable of reducing costs and taking a wide space. SOLUTION: The hand 3 of a robot is provided with an arm attaching part 10 and a substrate holding part 20, and a clamp cylinder 15 is mounted on the arm attaching part 10 so as to move a pusher 17. A tip receiving part 22 and a base receiving part 28 for holding a wafer W are formed at the substrate holding part 20, they are respectively provided with gentle slopes 221 and 281, and the tip receiving part 22 is provided with a steep slope 222. The pusher 17 originates the signal of 'substrate presence' when the wafer W is clamped at a wafer clamp position P2 after confirming a clamp origin position P1, and originates the signal of 'substrate absence' as an 'over-stroke position P3' at the time of moving over the wafer clamp position P2. |
