| 摘要 |
PROBLEM TO BE SOLVED: To provide the pressure-reducing method of a vacuum chamber for shortening the time required for a baking process. SOLUTION: When evacuating the vacuum chamber 2 after air has been released, plasma is generated in the vacuum chamber 2 in an initial exhaust process and adsorption gas, which is adsorbed to the inner wall face of the vacuum chamber 2 and is composed mainly of water can efficiently be removed by the mutual operation of adsorbed gas existing in the inner wall face of the vacuum chamber 2 and plasma. Thus, the time required for the subsequent baking process is shortened, and a vacuum level of a ultrahigh vacuum region can be obtained.
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