| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing machine capable of reducing the quantity of air or cooling water supplied to the casing of an air spindle. SOLUTION: According to a dicing machine 10, an air supply pipeline 30 and a cooling water supply pipeline 32 are provided with units 58, 70, each of which varies the quantity of air or cooling water to be supplied, so it is possible to vary the quantity of air or cooling water to be supplied by operating the units 58, 70. Therefore, when a wafer 14 is replaced, the quantity of air or cooling water to be supplied can be reduced, resulting in reducing the quantity of air or cooling water to be consumed. |
