METHOD AND DEVICE OF LIQUID TREATMENT OF PLATE MATERIAL

摘要

PROBLEM TO BE SOLVED: To solve the problem that liquid adhered to a plate opposing a plate material is not removed at the time of a gas treatment in a method of treating the material surface by consecutively supplying liquid and gas between the plate material and the plate opposed to it. SOLUTION: The periphery of the opposing plate is heated by imbedding heaters around it, irradiating it by a lamp, supplying heated liquid to it or by other methods to speed up the evaporation of the adhered liquid.