| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposing system for accurately detecting positional information for an object or a moving body using an optical system by preventing the distortions of an optical element provided, in the optical path of an light beam. SOLUTION: The optical element LZ put in the optical path of light beam is supported with three points, in contact with one face of the optical element LZ by using holding members 11 and 12. |
