| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem of a prior art such that a ceramic seal frame of a package body produces fine ceramic dust from its inner wall which obstructs a digital micromirror device from normally operating to result in no accurate image obtainable. SOLUTION: The package for housing a digital micromirror device 3 is composed of a package body 1 having a ceramic seal frame 1b surrounding a mount A for mounting the digital micromirror device 3 on an upside central part and a translucent cover 2 bonded to the upside of the seal frame 1b laminated on the upside of a ceramic tabular insulation base 1a having the mount A. The frame 1b has a center line mean roughness Ra of 2.0μm or less over its entire inner side surface.
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