| 摘要 |
PROBLEM TO BE SOLVED: To provide proper ways of correcting the change of image-forming characteristics which accompany pressure fluctuations, in terms of the throughput of a device and correction accuracy. SOLUTION: The stage driving to the exposure position begins (S501), at least one of the atmospheric pressure and environmental air pressure within a device is read at a certain interval, and the amount of pressure fluctuation from the read the barometric value is calculated (S502). Correction means is decided automatically from the correction means that correct the amount of change of the image-forming characteristic accompanying the pressure change from the calculated amount of pressure change, the correction is calculated from the amount of pressure change (S503), the image-forming characteristic is corrected (S504), and the pattern of an original plate is projected and exposed onto the original plate, that is mounted on the stage of the original plate by way of the projection optical system.
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