SUCTION HEAD FOR CONDUCTIVE BALL AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a suction head for a conductive ball which can cleanly remove burrs of a suction hole since the suction hole is apt to have the burrs when mechanically formed in the suction head and the burrs are possibly an obstacle when the conductive ball is sucked to cause a pick-up miss. SOLUTION: A thin hole is formed in the suction head 1 by a boring tool, and then the opening surface of the thin hole is tapered by a cutting too. Then the suction head 1 is put in a case 11 of a plasma processing device 10 and plasma produced between a lower electrode 12 and an upper electrode 13 is brought into contact with the suction head 11. Then the burrs produced at the edge of the tapered hole are burnt by the high-temperature plasma and cleanly removed.