| 摘要 |
<p>PROBLEM TO BE SOLVED: To greatly improve a scanning speed. SOLUTION: An electron beam, emitted from an electron gun having a cathode with thin top end face, is made to get into an aperture plate 5 having a plurality of apertures arranged in a row in the longitudinal direction almost parallel with the cathode 2, and the electron beam passed through the aperture is made to irradiate the surface of an object to be tested, and deflected by a deflector 21, and made to scan the irradiation point on the object to be tested in the above longitudinal direction, and the object to be tested is estimated by moving it in the direction perpendicular to the longitudinal direction of the same.</p> |
