| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a drive with linear motor which permits a solid body to be downsized by reducing the cross dimension of the solid body, and has no effect upon accuracy of a traveling position sensor even if pressure fluid of a fluid static pressure bearing acts on a guide from arrows (b) and (c). SOLUTION: This drive unit with the linear motor mounted with the linear motor between the solid body and a movable body and moves the movable body with the linear motor includes the roughly T-shaped solid body. In the solid body, a cross-sectional shape in an orthogonal direction to the traveling direction of the movable body consists of a central member and the guide which protrudes laterally on the upper portion of the central member; the movable body which moves along the guide across the upper portion of the solid body, and has a pair of mounting plates of facing the side surfaces of the central member of the solid body which protrude downward respectively on both ends in the orthogonal direction to the traveling direction, the linear motor mounted between both side surfaces of the central member of the solid body and both mounting plates of the movable body; and the sensor which is provided beneath the movable body of the central member of the solid body and detects the position of the movable body.</p> |
