APPARATUS AND METHOD OF SURFACE TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a small and simply structured apparatus of surface treatment capable of universally shutting off a treating space for treating surface of a material to be treated from a carrying space including a carrying means and preventing leakage of treating gas from the treating space to the carrying space. SOLUTION: Between a lower end of a covering wall 47 for covering the surface treating means 41 and surface of a dummy D disposed in circumference of the material to be treated carried by the carrying means 2 through a holding pallet 3, a gap 8 to which carrying-space gas can flow from the carrying space 1a side including the carrying means to the treating space 4a inside of the covering wall 47 is formed, a treating-gas introduction line 45 is put through to the treating space 4a, and a carrying-space gas delivery line 6 is put through to the carrying space 1a to make the gas pressure in the carrying space 1a higher than that in the treating space 4a.