| 摘要 |
PROBLEM TO BE SOLVED: To shorten the wiring from a probe pin to a connection electrode to an inspection substrate. SOLUTION: This structure is equipped with a body substrate 7, plural probe pins 3 erected on each prescribed position on the upper face of the body substrate, plural through electrodes 5 corresponding individually to plural electrodes K1 of the inspection substrate K, and a rewiring layer 4 for connecting individually each probe pin 3 to each through electrode 5 on the upper face of the body substrate. The probe pin 3 is formed by using silicon as a core and coating a conductive film 32 on its surface. Each through electrode 5 penetrates the inside of the body substrate 7 and arrives from one face up to the other face, and a pitch between each through electrode exposed on the other face side of the body substrate 7 is set larger than a pitch between each probe pin.
|
