| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma device which is excellent in uniformity and efficiency without greatly changing a conventional dimension of a magazine for storing a plurality of substrates. SOLUTION: In a magazine 7 for storing a substrate which is installed inside a vacuum chamber, a slit 2 for storing a substrate 1 in each step layer is provided, both ends 5, 6 are constituted of an insulator, two metallic plates supporting the substrate 1 are made as a cathode electrode 3 with a slit and an anode electrode 4 with a slit, high frequency power is applied between the electrodes, and plasma is generated.
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