| 摘要 |
PROBLEM TO BE SOLVED: To obtain a film, having low dependence on the wavelength and low dependence on the incident and exiting angles and having high antireflection effect and transmission enhancing effect as an antireflection film on the surface of optical parts or optical element by a high mass productivity method. SOLUTION: The antireflection film 11 has a non-periodical sponge-like microstructure with a complicated structure of a substance and vacancies formed on the surface of optical parts or optical element 12, and the non-periodical sponge-like microstructure is formed from the residue of plasma processing containing metal compounds. |
