ELECTRON BEAM DEVICE AND MANUFACTURING METHOD OF DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electron beam device in which multiple emitters are made applicable by selecting only the emitters, which can emit multiple beams, from a number of emitters. SOLUTION: For the electron beam device 1 which detects a secondary emission of electron emitted from a sample and estimates the surface the sample by irradiating multiple beams emitted from an array of emitters arranged at least two dimensionally, a voltage is selectively applied on each emitter 112 through a terminal by connecting the terminal corresponding to each emitter of the emitter array, and the voltage is applied only on the emitters fulfilling performance as multiple beams, and the only electron beams emitted from the above emitters are utilized.